发明名称 Method of depositing epitaxial layers on a substrate
摘要 An epitaxial article and method for forming the same includes a substrate having a textured surface, and an electrochemically deposited substantially single orientation epitaxial layer disposed on and in contact with the textured surface. The epitaxial article can include an electromagnetically active layer and an epitaxial buffer layer. The electromagnetically active layer and epitaxial buffer layer can also be deposited electrochemically.
申请公布号 US6670308(B2) 申请公布日期 2003.12.30
申请号 US20020101218 申请日期 2002.03.19
申请人 UT-BATTELLE, LLC 发明人 GOYAL AMIT
分类号 C23C18/16;C25D5/34;C25D7/00;C30B7/00;C30B7/12;C30B23/02;H01L39/24;(IPC1-7):H01L39/24;C25D9/00 主分类号 C23C18/16
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