发明名称 |
CHARGED PARTICLE BEAM GENERATOR |
摘要 |
The source of electrons is a nanotip in a vacuum as used in near field microscopy. The source of ions is a similar nanotip in vacuum supplied with liquid metal (gallium) as in a liquid-metal ion source. Electrons or ions fr om this nanometre-sized tip are extracted by centralising the tip over an aperture plate and applying a suitable voltage to the tip. The electrons (ions) pass through this plate and are accelerated up to several keV using a nanoscale/microscale accelerating column before being focussed using further microscale (or nanoscale) cylindrical lenses. The final element is an aberration corrected miniature (or sub-miniature) einzel lens which can focu s the beam at several millimetres from the end of the instrument.
|
申请公布号 |
CA2492835(A1) |
申请公布日期 |
2003.12.24 |
申请号 |
CA20032492835 |
申请日期 |
2003.06.16 |
申请人 |
NFAB LIMITED |
发明人 |
EASTHAM, DEREK ANTHONY |
分类号 |
G21K1/00;H01J37/06;H01J37/12;H01J37/26;H01J37/28;H01J37/317;(IPC1-7):H01J37/26 |
主分类号 |
G21K1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|