发明名称 ENHANCED STRUCTURE AND METHOD FOR BURIED LOCAL INTERCONNECTS
摘要 <p>A structure and method is disclosed for forming a buried interconnect (10) of an integrated circuit in a single crystal semiconductor layer (12) of a substrate. The buried interconnect is formed of a deposited conductor and has one or more vertical sidewalls (18) which contact a single crystal region of an electronic device (20) formed in the single crystal semiconductor layer.</p>
申请公布号 WO2003107430(P1) 申请公布日期 2003.12.24
申请号 US2002019238 申请日期 2002.06.14
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