Sätt att framställa formverktyg för ett reliefmönster i nanoskala, formverktyg och lagringsmedium

摘要

A stamp blank (2) with a structured pattern is provided on a stamp surface (8) before depositing a layer (6) of metal having stable oxidation number on the patterned surface (8). Reagents comprising molecule chains (18) having a linkage group (20), is applied on an oxide film (10) formed by oxidizing the metal layer. The chains include a group comprising fluorine either at outset or in subsequent treatment. Independent claims are also included for the following: (1) mold tool; and (2) storage medium e.g. disk formed using mold tool.