发明名称 |
Micropump assembly for a microgas chromatograph and the like |
摘要 |
A MEMS-fabricated microvacuum pump assembly is provided. The pump assembly is designed to operate in air and can be easily integrated into MEMS-fabricated microfluidic systems. The pump assembly includes a series of pumping cavities with electrostatically-actuated membranes interconnected by electrostatically-actuated microvalves. A large deflection electrostatic actuator has a curved fixed drive electrode and a flat movable polymer electrode. The curved electrodes are fabricated by buckling the electrode out-of-plane using compressive stress, and the large deflection parallel-plane electrostatic actuators are formed by using the curved electrode. The curved electrode allows the movable electrode to travel over larger distances than is possible using a flat electrode, with lower voltage. The movable electrode is a flat parylene membrane that is placed on top of the curved electrode using a wafer-level transfer and parylene bonding process. Using this approach, large out-of-plane deflection of the parylene membrane is achieved using a voltage smaller than is achievable using flat parallel-plate electrodes.
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申请公布号 |
US2003231967(A1) |
申请公布日期 |
2003.12.18 |
申请号 |
US20030436937 |
申请日期 |
2003.05.13 |
申请人 |
NAJAFI KHALIL;KIM HANSEUP S.;BERNAL LUIS P.;ASTLE AARON A.;WASHABAUGH PETER D. |
发明人 |
NAJAFI KHALIL;KIM HANSEUP S.;BERNAL LUIS P.;ASTLE AARON A.;WASHABAUGH PETER D. |
分类号 |
F04B43/04;F04B45/047;(IPC1-7):F04B17/00 |
主分类号 |
F04B43/04 |
代理机构 |
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代理人 |
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主权项 |
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