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发明名称
Fertigungsverfahren zur Herstellung eines CMOS integrieten Schaltkreises mit vertikalen Transistoren
摘要
申请公布号
DE60001601(T2)
申请公布日期
2003.12.18
申请号
DE20006001601T
申请日期
2000.06.06
申请人
LUCENT TECHNOLOGIES INC., MURRAY HILL
发明人
HERGENROTHER, JOHN MICHAEL;MONROE, DONALD PAUL
分类号
H01L21/336;H01L21/8238;H01L27/06;H01L27/092;H01L29/78;(IPC1-7):H01L21/823
主分类号
H01L21/336
代理机构
代理人
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