WAFER CHUCK USED IN SEMICONDUCTOR FABRICATING APPARATUS

摘要

PURPOSE: A wafer chuck used in a semiconductor fabricating apparatus is provided to prevent the outside air from being induced to a chamber through a welded portion by forming a transfer path of pins at the edge of a supporter of a wafer chuck. CONSTITUTION: A plurality of pins(40) are capable of moving vertically. A wafer is placed on the supporter(10) in which the transfer path of the pins are formed. A heater(30) heats the supporter, located under the supporter. The heater is placed on a base(20). The supporter has an area broader than that of the heater. The transfer path is located in the edge of the supporter corresponding to the outer of the heater.