| 摘要 |
PURPOSE: A window of a semiconductor manufacturing equipment is provided to be capable of preventing the etching phenomenon generated at the window by forming the window using ceramic or industrial diamond. CONSTITUTION: A rectangular type hole is formed at the predetermined portion of a chamber body part(10). A frame(12) is inserted into the hole of the chamber body part. At this time, the frame is fixed to the chamber body part by using a screw(24). The first O-ring(22) is inserted in the frame. The first O-ring is used for preventing the leak generated between the hole of the chamber body part and the frame. The second O-ring(14) is inserted into a window(16). At this time, the window is made of predetermined material. Preferably, ceramic is used as the predetermined material. Preferably, an industrial diamond is capable of being used as the predetermined material.
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