| 发明名称 |
A SYSTEM AND METHOD FOR PREVENTING OPERATIONAL AND MANUFACTURING IMPERFECTIONS IN PIEZOELECTRIC MICRO-ACTUATORS |
| 摘要 |
<p>A system and method for preventing operational and manufacturing imperfections in piezoelectric micro-actuators by physically and electrically isolating conductive layers of the piezoelectric material.</p> |
| 申请公布号 |
WO03105131(A1) |
申请公布日期 |
2003.12.18 |
| 申请号 |
WO2002CN00392 |
申请日期 |
2002.06.05 |
| 申请人 |
SAE MAGNETICS (H.K.) LTD. |
发明人 |
YAO, MINGGAO;SHIRAISHI, MASASHI |
| 分类号 |
B23P17/00;G11B5/48;H01L41/047;H01L41/08;H01L41/09;H01L41/27;H01L41/338;H01L41/39;(IPC1-7):G11B5/48 |
主分类号 |
B23P17/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
