PROCESSING DEVICE AND PROCESSING METHOD

摘要

A chamber (12) having a substantially triangular cross-section has at one side thereof a gas supply port (13) and at its apex opposed thereto an exhaust port (14). Further, the gas supply port (13) is provided with a shower head-like gas supply section (15). Thereby, the chamber (12) is arranged such that the cross-sectional area (S) of a gas flow channel formed to extend from the gas supply port (13) to the exhaust port (14) gradually decreases toward the gas supply direction (x-direction). At this time, the thickness (delta) of the boundary layer (28) formed on the wall surface of the chamber (12) is substantially constant.