发明名称 Method of making pad-rerouting for integrated circuit chips
摘要 A method for forming printed re-routing for wafer level packaging, especially chip size packaging. The method includes forming a contact layer on a semiconductor die, printing a conductive redistribution structure on the contact layer, and etching the contact layer of the die by using the conductive redistribution structure as a self-aligning mask.
申请公布号 US6664176(B2) 申请公布日期 2003.12.16
申请号 US20010944796 申请日期 2001.08.31
申请人 INFINEON TECHNOLOGIES AG 发明人 HEDLER HARRY;MEYER THORSTEN;RUCKMICH STEFAN;VASQUEZ BARBARA
分类号 H01L23/48;H01L21/60;H01L23/31;H01L23/485;H01L23/525;(IPC1-7):H01L21/44 主分类号 H01L23/48
代理机构 代理人
主权项
地址