发明名称 |
Mirror positioning assembly with vertical force component compensation |
摘要 |
A microelectromechanical system is disclosed that constrains the direction of a force acting on a first load, where the force originates from the interaction of the first load and a second load. In particular, the direction of a force acting on the first load is caused to be substantially parallel with a motion of the first load. This force direction constraint is achieved by a force isolator microstructure that contains no rubbing or contacting surfaces. Various embodiments of structures/methods to achieve this force direction constraint using a force isolator microstructure are disclosed.
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申请公布号 |
US6665104(B2) |
申请公布日期 |
2003.12.16 |
申请号 |
US20020097127 |
申请日期 |
2002.03.12 |
申请人 |
MEMX, INC. |
发明人 |
RODGERS MURRAY STEVEN;MILLER SAMUEL LEE;BARNES STEPHEN MATTHEW;SNIEGOWSKI JEFFRY JOSEPH;MCWHORTER PAUL JACKSON |
分类号 |
G02B26/08;(IPC1-7):G02B26/08;G02F1/29 |
主分类号 |
G02B26/08 |
代理机构 |
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主权项 |
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