发明名称 MICRO MACHINED POLYMER BEAM STRUCTURE METHOD AND RESULTING DEVICE FOR SPRING APPLICATIONS
摘要 <p>An integrated composite beam structure. The structure has a substrate, which includes a surface and a thickness defined underlying the surface. The substrate is composed of a first material. A thickness of polymer based material includes a first portion, a length, and a second portion. The second is coupled to a portion of the substrate. The length is defined between the first portion and the second portion. The structure also has a spring constant (K) of less than a predetermined amount (e.g., 10 N/m, 1 N/m) characterizing the length of the polymer based beam structure. The first portion is capable of moving in a first direction characterized by the spring constant upon application of an externally applied force and is substantially fixed in a second direction, which is normal to the first direction. The second end is capable of returning to a predetermined state when the externally applied force has been removed. The second portion includes a selected geometric configuration to secure the second portion to the portion of the substrate.</p>
申请公布号 WO2003102540(P1) 申请公布日期 2003.12.11
申请号 US2003016977 申请日期 2003.05.29
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