首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
MICRO-ENVIRONMENT REACTOR FOR PROCESSING A MICROELECTRONIC WORKPIECE
摘要
申请公布号
EP1085948(B1)
申请公布日期
2003.12.10
申请号
EP19990912558
申请日期
1999.03.15
申请人
SEMITOOL, INC.
发明人
CURTIS, GARY, L.;THOMPSON, RAYMON, F.;PEACE, STEVEN, L.
分类号
H01L21/00;B08B3/04;B05C11/08;B08B3/02;H01L21/304;H01L21/306;H01L21/3213;(IPC1-7):B08B3/02
主分类号
H01L21/00
代理机构
代理人
主权项
地址
您可能感兴趣的专利
VPN CONNECTION SYSTEM
LAMINATE
POWER SUPPLY CONTROL DEVICE FOR VEHICLE
SOLAR CELL, SOLAR CELL MODULE, AND MANUFACTURING METHOD OF SOLAR CELL
METHOD FOR COMMUNICATION SPEED MEASUREMENT, AND COMMUNICATION SYSTEM
PHOTOELECTRIC CONVERSION DEVICE AND METHOD OF MANUFACTURING THE SAME
ELECTRON EMISSION SOURCE PASTE
PATTERN FORMING METHOD, PATTERN FORMING APPARATUS
PORTABLE ELECTRONIC APPARATUS
CAM FOLLOWER
PACKAGE AND PIEZOELECTRIC VIBRATOR
ADAPTER DISCRETE TYPE DISK ROTOR
ENDOSCOPIC IMAGE DISPLAY APPARATUS
WIRE CONVEYOR
SPHERICAL BODY AND ROLLING SUPPORT DEVICE USING THE SAME
BLOWER DEVICE
LIGHTING DEVICE, LUMINAIRE AND LIGHTING SYSTEM
METHOD OF MANUFACTURING PACKAGE SUBSTRATE FOR MOUNTING SEMICONDUCTOR ELEMENT
POLARIZATION CONVERSION ELEMENT AND METHOD FOR MANUFACTURING POLARIZATION CONVERSION ELEMENT
STRUCTURE OF PROJECTED PIECE IN BELT TYPE ELEVATOR
