发明名称 Method of manufacturing an active matrix type display circuit
摘要 An active matrix circuit using top-gate type thin-film transistors is characterized in that an auxiliary capacitor is formed between a black matrix and an N-type or P-type active layer, and uses, as a dielectric, a silicon nitride layer used as a passivation film of an interlayer insulator. Also, an active matrix circuit using bottom-gate type thin-film transistors is characterized in that two auxiliary capacitors. One of the auxiliary capacitors is formed between a capacitor wiring line formed on a substrate and an N-type or P-type conductive region or a metal wiring line connected to the conductive region, and uses a gate insulating film as a dielectric. The other one of the auxiliary capacitors is formed between a black matrix and said N-type or P-type conductive region or said metal wiring line connected to the conductive region, and uses a silicon nitride layer used as a passivation film as a dielectric. Said two auxiliary capacitors are located in three-dimension for preventing aperture ratio from lowering.
申请公布号 US6660549(B2) 申请公布日期 2003.12.09
申请号 US20010906883 申请日期 2001.07.16
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;TAKEMURA YASUHIKO
分类号 G02F1/1362;H01L29/786;(IPC1-7):H01L21/00 主分类号 G02F1/1362
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