| 摘要 |
<P>PROBLEM TO BE SOLVED: To stably and efficiently manufacture a work holding plate which is capable of protecting the rear surface of a work against scratches or smears when the work is polished and making the front surface of the work excellent in flatness and a mirror finished surface. <P>SOLUTION: The method of manufacturing the work holding plate for holding the work by vacuum suction comprises a first step of applying resin of high viscosity on the work holding surface of the work holding plate body formed with a through-hole for attracting the work and forming a first resin layer by drying the applied resin layer, a second step of applying a resin having viscosity lower than the resin of the first resin layer on the surface of the first resin layer and forming a second layer by drying the resin layer applied on the first resin layer, and a third step of forming an opening communicating with the through-hole formed in the work holding plate body in the laminated resin layer composed of the first resin layer and the second resin layer. <P>COPYRIGHT: (C)2004,JPO |
