METHOD OF MANUFACTURING WORK HOLDING PLATE, WORK HOLDING PLATE, AND WORK POLISHING METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To stably and efficiently manufacture a work holding plate which is capable of protecting the rear surface of a work against scratches or smears when the work is polished and making the front surface of the work excellent in flatness and a mirror finished surface.

SOLUTION: The method of manufacturing the work holding plate for holding the work by vacuum suction comprises a first step of applying resin whose viscosity is 90 Pa.s or above on the work holding surface of a work holding plate body formed with a through-hole for attracting the work and forming a resin layer by drying the applied resin layer and a second step of forming an opening communicating with the through-hole formed in the work holding plate body in the resin layer.

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