| 摘要 |
PROBLEM TO BE SOLVED: To properly and further quickly perform the maintenance of the inside of an exhaust passage extending inside a support ring which contains a heating plate. SOLUTION: The support ring 62 is separated into three ring members, an upper ring member 70, a middle ring member 71, and a lower ring member 72. A gap is formed to a joint between the upper ring member 70 and the middle ring member 71, and the gap is made to serve as the exhaust passage 66. When maintenance such as the cleaning of the exhaust passage 66 is carried out, the upper ring member 70 and the middle ring member 71 are dismounted from the lower ring member 72 fixed to a treatment device, furthermore the upper ring member 70 and the middle ring member 71 are separated from each other to make the exhaust passage 66 exposed. By this setup, the maintenance of the inside of the exhaust passage 66 can be more properly performed in a shorter time. COPYRIGHT: (C)2004,JPO |
