发明名称 |
LIFTING AND SUPPORTING DEVICE |
摘要 |
The invention relates to a lifting and supporting device for handling and positioning particularly large-surface elements in the shape of panels, especially in plasma processing installations. Said lifting and supporting device comprises a particularly metallic base plate, on which a plurality of particularly dielectric pins are arranged. Said pins may be set in pin holes especially provided in the base plate. Said panel-shaped element may be positioned on the pin end for the handling thereof or during a plasma processing. Said panel-shaped element may present an electrostatic charge. A small diameter for the pins and pin holes is selected such that, in conformity with the panel-shaped element provided with the electrostatic charge, an undesired electrostatic charge on said panel-shaped element is essentially avoided or, in conformity with the panel-shaped element to be plasma processed, a plasma perturbation in the area of the pin holes or pins is essentially avoided. |
申请公布号 |
WO03008323(A3) |
申请公布日期 |
2003.12.04 |
申请号 |
WO2002EP07856 |
申请日期 |
2002.07.15 |
申请人 |
UNAXIS BALZERS AKTIENGESELLSCHAFT;ELYAAKOUBI, MUSTAPHA;SCHMITT, JACQUES |
发明人 |
ELYAAKOUBI, MUSTAPHA;SCHMITT, JACQUES |
分类号 |
H05H1/46;C23C16/458;H01L21/00;H01L21/205;H01L21/683;H01L21/687 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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