发明名称 FERROELECTRIC CAPACITOR AND METHOD OF MANUFACTURING THE SAME
摘要 <p>semiconductor device comprises a bottom electrode, a top electrode, and a dielectric film provided between the bottom electrode and the top electrode and made of a perovskite type ferroelectrics containing Pb, Zr, Ti and O, the dielectric film comprising a first portion formed of a plurality of crystal grains partitioned by grain boundaries having a plurality of directions.</p>
申请公布号 WO2003100824(P1) 申请公布日期 2003.12.04
申请号 JP2003006671 申请日期 2003.05.28
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