| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow rate measurement device excellent in the breakage strength of an insulator film. <P>SOLUTION: The flow rate measurement device including a plurality of flow rate measuring resistors 30, 31, 32, and 33 which are supplied with currents for measuring the flow rate of a fluid; a base material 21 which is approximately formed like a plate and which includes a hollow 24 having an opening at the surface 21a; and the insulator film 26 which is formed on the side 21a of the base material 21 and which includes a membrane 27 covering the opening 25 of the hollow 24 and involving the flow rate measuring resistors 30, 31, 32, and 33. The fluid to be measured flows over the side 27a of the membrane part 27 reverse to the hollow 24, and the membrane 27 is formed like a sectional arch swelling out to the side 27a reverse to the hollow 24. <P>COPYRIGHT: (C)2004,JPO</p> |
