| 摘要 |
PROBLEM TO BE SOLVED: To provide a peeling liquid for selectively peeling a nickel or nickel alloy film at a high speed without peeling films consisting of metals other than nickel or nickel alloys, particularly, copper and copper alloy films and tin and tin alloy films. SOLUTION: The peeling liquid for nickel or nickel alloys comprises an aqueous solution containing (a) hydrogen peroxide, (b) an inorganic acid, (c) a quaternary ammonium salt and (d) a 3 to 7C aliphatic alcohol. COPYRIGHT: (C)2004,JPO
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