| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for performing the continuous operation, and operating a coating recovering device for reducing the cost for equipment while suppressing concentration changes of the concentrated liquid. SOLUTION: The concentrated liquid is obtained by the circulating- concentration of cleaning water from a final rinsing tank 5 by a membrane filtering device 14 is controlled in a range of a predetermined concentration while a part of the concentrated liquid is continuously discharged outside a system of the coating recovering device. the filtered liquid of the quantity according to the difference of the discharge quantity to the outside of the coating recovering device of the concentrated liquid subtracted from the quantity of pure water newly fed to the final rinsing tank 5 out of the filtered liquid by the membrane filtering device 14 is discharged outside the circulation system of the final rinsing step, and the remaining filtered liquid is fed in the final rinsing tank 5 for continuous operation. COPYRIGHT: (C)2004,JPO
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