发明名称 Speed control of variable speed control pump
摘要 Method, article of manufacture and apparatus for monitoring operating characteristics of a system comprising a variable speed vacuum pump. Operating characteristics reflective of gas load on the pump are observed for behavior indicating a change in the gas load. In one embodiment, the operating characteristic is the current in a power signal being provided to the pump.
申请公布号 US2003219342(A1) 申请公布日期 2003.11.27
申请号 US20020154410 申请日期 2002.05.22
申请人 APPLIED MATERIALS, INC. 发明人 CURRY MARK WILLIAM;GREENBANK DANIEL PAUL;LU DANNY CAM TOAN
分类号 F04D19/04;F04D27/02;(IPC1-7):F04B49/06 主分类号 F04D19/04
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