发明名称 |
Speed control of variable speed control pump |
摘要 |
Method, article of manufacture and apparatus for monitoring operating characteristics of a system comprising a variable speed vacuum pump. Operating characteristics reflective of gas load on the pump are observed for behavior indicating a change in the gas load. In one embodiment, the operating characteristic is the current in a power signal being provided to the pump.
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申请公布号 |
US2003219342(A1) |
申请公布日期 |
2003.11.27 |
申请号 |
US20020154410 |
申请日期 |
2002.05.22 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
CURRY MARK WILLIAM;GREENBANK DANIEL PAUL;LU DANNY CAM TOAN |
分类号 |
F04D19/04;F04D27/02;(IPC1-7):F04B49/06 |
主分类号 |
F04D19/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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