FAULT DETECTION AND VIRTUAL SENSOR METHODS FOR TOOL FAULT MONITORING

摘要

A method of fault detection groups together operational parameters of a semiconductor processing tool that correlate with one another to generate a fault detection index. These related active sensors are utilized in the selection process of the nearest neighbor vectors to form a vector subset, and are also considered in generating the fault detection index. Cluster sensors are used in the selection process to select data from the model that matches the cluster sensor value. A passive/inclusive sensor is not used to generate predicted values from a model. The value of a passive/inclusive sensor type is used in calculation of the fault detection index. Synthetic sensors are not utilized in the selection process of the nearest neighbor vectors making up the vector subset, and are not utilized in generating the fault detection index.