| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for effectively separating and concentrating a fluorine compd. widely used for a refrigeration medium, etching at a semiconductor production stage, cleaning, etc., of a semiconductor production device and other various usages, from a mixture containing the same. SOLUTION: The fluorine compd. is separated from a gaseous mixture by bringing the gaseous mixture containing the fluorine compd. such as NF3 , SF6 , a hydrofluorocarbon, a perfluorocarbon into contact with a gas separation membrane consisting of a high-mrolerular polymer comprising mainly of poly (4-methylpentene-1) or polysulfone and by making the fluorine compd. imperneate the membrane and the remaining gas components permeate the membrane.</p> |
