MICRO GYROSCOPE

摘要

PURPOSE: A micro gyroscope is provided to secure a new tuning structure not changing a vibration mode even if production errors of an inertial mass are generated, by forming a supporting beam for supporting the inertial mass into a single beam. CONSTITUTION: A micro gyroscope is composed of a substrate; a plurality of inertial masses(301a,301b,301c) for floating on the substrate and vibrating in parallel and vertically to the substrate; a pair of supporting beams(302) extended at both sides of the inertial mass to support the inertial mass to float; anchors for propping up the supporting beams, respectively; an exciting device for generating electrostatic force and vertically vibrating the inertial masses in parallel to the substrate and vertically to the extended direction of the supporting beam; and a sensing device for sensing input angular velocity. The supporting beams are in a pair and a single beam straightly arranged to mutually tune vibrations of plural inertial masses.