| 摘要 |
PROBLEM TO BE SOLVED: To increase charging power by enhancing cooling efficiency, and to improve the positioning accuracy of a stage by accelerating the stage and decreasing generated heat. SOLUTION: A coil 1 and an inside jacket that covers the coil 1 by sheets 4 and 4' and is supplied with a coolant in an internal space 6 are provided. A linear motor has a double-jacket structure added with an outside jacket by arranging sheets 7 and 7' outside the inside jacket. Reinforcing members 9 and 9' for reinforcing the double jacket against the pressure of the coolant are provided inside the double jacket. The reinforcing members 9 and 9' are positioned between the sheets 4 and 4' forming the internal space 6 of the inside jacket and the sheets 7 and 7' forming internal spaces 8 and 8' of the outside jacket. COPYRIGHT: (C)2004,JPO |
