| 摘要 |
PROBLEM TO BE SOLVED: To reduce gas leakage from a side seal portion of a vacuum pump in which side seal of a rotor is performed by lessening a side clearance, and to enhance vacuumizing performance of the pump. SOLUTION: A thin plate 20 is inserted in at least one of between the rotor 5 and an end frame 2 and between the rotor 5 and a housing 1. The thin plate 20 is bent by negative pressure in a pump chamber 13 and is sucked on a rotor side. A clearance C between the rotor 5 and the thin plate 20 is thus lessened, and gas leakage from it is reduced. COPYRIGHT: (C)2004,JPO
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