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发明名称
APPARAT UND METHODE FÜR DIE MECHANISCHE UND CHEMISCH-MECHANISCHE PLANARISIERUNG VON MIKROELEKTRONIKSUBSTRATEN
摘要
申请公布号
AT254012(T)
申请公布日期
2003.11.15
申请号
AT19980966113T
申请日期
1998.12.29
申请人
MICRON TECHNOLOGY, INC.
发明人
MOORE, SCOTT, E.
分类号
B24B37/00;B24B37/04;B24D13/14;(IPC1-7):B24B37/04
主分类号
B24B37/00
代理机构
代理人
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