| 发明名称 |
COLLECTOR WITH FASTENING DEVICES FOR FASTENING MIRROR SHELLS |
| 摘要 |
The invention relates to a collector for a projection printing installation, which is operated in a scanning mode along a scanning direction with a wavelength </= 193 nm, preferably </= 126 nm, more preferably with extreme UV wavelengths. According to the invention, said collector receives light from a light source on the object side and illuminates a region in an image plane, said plane being fixed by a local system of coordinates. The y-direction of the local system of coordinates is parallel to the scanning direction and the x-direction is perpendicular thereto. Said collector comprises a plurality of rotationally symmetrical mirror shells, each comprising at least one first mirror segment, which has a first optical surface, said mirror shells being arranged within each other about a common rotation axis. Said collector also comprises fastening devices, for fastening the plurality of rotationally symmetrical mirror shells, and said fastening devices comprise support spokes, which extend in the radial direction of the rotationally symmetrical mirror shells. The invention is characterized in that the support spokes are arranged, such that when they are projected in the plane to be illuminated on the image side, they are inclined in relation to the y-direction of the local system of coordinates in the image plane. |
| 申请公布号 |
WO03014833(A3) |
申请公布日期 |
2003.11.13 |
| 申请号 |
WO2002EP08193 |
申请日期 |
2002.07.23 |
| 申请人 |
CARL ZEISS SMT AG;SINGER, WOLFGANG;EGLE, WILHELM;WEISS, MARKUS;HAINZ, JOACHIM;WIETZORREK, JOACHIM;WANGLER, JOHANNES;MELZER, FRANK |
发明人 |
SINGER, WOLFGANG;EGLE, WILHELM;WEISS, MARKUS;HAINZ, JOACHIM;WIETZORREK, JOACHIM;WANGLER, JOHANNES;MELZER, FRANK |
| 分类号 |
G02B5/09;G02B17/06;G02B19/00;G03F7/20;G21K1/06;G21K5/04 |
主分类号 |
G02B5/09 |
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