发明名称 DEVICE, ITS MANUFACTURING METHOD, ELECTROOPTICAL DEVICE, AND ELECTRONIC DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a semiconductor device wherein an area doped at a high concentration instead of ion implantation is formed on a semiconductor film. <P>SOLUTION: The device is provided with a semiconductor film (12) formed on a substrate (11), a gate area (15) that is formed by laminating a gate insulation film (13) formed on the semiconductor film and a gate electrode film (14), an isolating means (A) that prevents the gate electrode films formed on both sides of the gate area from being in contact with another area, a source area and a drain area which are formed on both sides of the gate area by baking a liquid semiconductor material (17). <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2003318191(A) 申请公布日期 2003.11.07
申请号 JP20020119964 申请日期 2002.04.22
申请人 SEIKO EPSON CORP 发明人 AOKI TAKASHI;FURUSAWA MASAHIRO;YUDASAKA KAZUO
分类号 G02F1/1368;H01L21/225;H01L21/336;H01L29/786;(IPC1-7):H01L21/336;G02F1/136 主分类号 G02F1/1368
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