发明名称 |
DEVICE, ITS MANUFACTURING METHOD, ELECTROOPTICAL DEVICE, AND ELECTRONIC DEVICE |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a semiconductor device wherein an area doped at a high concentration instead of ion implantation is formed on a semiconductor film. <P>SOLUTION: The device is provided with a semiconductor film (12) formed on a substrate (11), a gate area (15) that is formed by laminating a gate insulation film (13) formed on the semiconductor film and a gate electrode film (14), an isolating means (A) that prevents the gate electrode films formed on both sides of the gate area from being in contact with another area, a source area and a drain area which are formed on both sides of the gate area by baking a liquid semiconductor material (17). <P>COPYRIGHT: (C)2004,JPO</p> |
申请公布号 |
JP2003318191(A) |
申请公布日期 |
2003.11.07 |
申请号 |
JP20020119964 |
申请日期 |
2002.04.22 |
申请人 |
SEIKO EPSON CORP |
发明人 |
AOKI TAKASHI;FURUSAWA MASAHIRO;YUDASAKA KAZUO |
分类号 |
G02F1/1368;H01L21/225;H01L21/336;H01L29/786;(IPC1-7):H01L21/336;G02F1/136 |
主分类号 |
G02F1/1368 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|