| 摘要 |
PROBLEM TO BE SOLVED: To provide a new measuring method, which can measure fine particles in ultrapure water containing extremely few fine particles. SOLUTION: In the method, number frequency is measured about the fine particles with a size of not less than 0.1μm because of such a viewpoint that the fine particles follow a log normal distribution in the ultrapure water at a use point of an ultrapure water producing system, and the log normal distribution of the fine particles contained in the ultrapure water is determined, and thereby obtaining the number of fine particles with a size smaller than that of the fine particles being measured in the ultrapure water based on the distribution. COPYRIGHT: (C)2004,JPO
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