APPARATUS FOR ADDITION CONTROL OF ULTRA SMALL AMOUNT OF LIQUID AND GAS-DISSOLVED WATER PRODUCTION APPARATUS AND GAS-DISSOLVED WATER PRODUCTION METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an apparatus having a simple structure and capable of continuously adding a high concentration solution at an extremely low flow rate; an apparatus comprising the former apparatus for producing ultrapure water in which a gas is dissolved by dissolving the chemical liquid; and a method for producing ultrapure water in which a gas is dissolved by dissolving the chemical liquid. SOLUTION: The ultra small amount addition control apparatus is for continuously supplying an aqueous solution containing an electrolyte to continuously flowing ultrapure water and comprises a thin pipe equipped with a valve and connecting an apparatus for supplying the aqueous solution containing the electrolyte with a water flow pipe of the ultrapure water so as to control the supply amount by opening or closing the valve. The gas-dissolved water production apparatus comprises the ultra small amount addition control apparatus and an apparatus for obtaining ultrapure water containing a reducing or oxidizing gas by dissolving the reducing or oxidizing gas in ultrapure water. The gas-dissolved water production is carried out using the gas-dissolved water production apparatus. COPYRIGHT: (C)2004,JPO