| 摘要 |
A superconductor integrated circuit (10) includes a silicon substrate (12) a niobium ground layer (14), an anodized niobium first ground insulator layer (16), a second ground insulator layer (22), a molybdenum nitrogen (MoNx) resistor (18) provided between the first and second ground insulator layers (16, 22), a Josephson junction (23) provided above the first and second ground insulator layers (16, 22), first and second oxide insulators (27, 30), and a niobium interconnect (28) for providing electrical communication with the Josephson junction. The MoNx first resistor (18) provides a sheet resistance of between 3-5 ohms/sq at 4° K with a thickness of approximately 95 nm and enables the superconductor integrated circuit (10) to have a critical current density between 6-8 kA/cm<2>.
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