发明名称 |
SURFACE TREATMENT METHOD, PLATING TREATED PART, AND ALIGNER |
摘要 |
PROBLEM TO BE SOLVED: To provide a surface treatment method by which the formation of cloudy substances can be suppressed. SOLUTION: The method includes a plating treatment stage S1 wherein the surface of the member as the object for treatment is subjected to black chromium plating treatment, and a cleaning stage S5 wherein the member as the object for treatment subjected to the black chromium plating treatment is subjected to hot water washing. The hot water washing time is set on the basis of the amount of prescribed ions remaining in the member as the object for treatment accompanied by the black chromium plating treatment. COPYRIGHT: (C)2004,JPO |
申请公布号 |
JP2003306798(A) |
申请公布日期 |
2003.10.31 |
申请号 |
JP20020116637 |
申请日期 |
2002.04.18 |
申请人 |
NIKON CORP |
发明人 |
MATSUURA KEIJI;SHOJI KIYOSHI |
分类号 |
G03F7/20;C25D5/50;C25D7/00;C25D21/08;H01L21/027;(IPC1-7):C25D21/08 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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