发明名称 CONTACT BODY FOR SIGNAL DETECTION AND SIGNAL CALIBRATING DEVICE
摘要 PROBLEM TO BE SOLVED: To solve a problem in the timing calibrating method stated in the Patent Publication No. 2000-352578, that it is impossible to correct disagreement in timing of signal transmission among signal lines caused by slight difference in physical properties owing to manufacturing processes, etc., of signal lines, etc., for signal transmission, although it is possible to calibrate signal delay time from the time point of signal generation to the time point of signal arrival at an IC (integrated circuit) test device based on the length of the signal transmission line. SOLUTION: A contact body 12 for phase difference detection has a contact body proper 121 and three coaxial bodies 122 including a core 122A, exposed at three positions on the surface of the body proper 121 to make contact with a probe 24A. COPYRIGHT: (C)2004,JPO
申请公布号 JP2003307552(A) 申请公布日期 2003.10.31
申请号 JP20020114950 申请日期 2002.04.17
申请人 TOKYO ELECTRON LTD 发明人 WATANABE CHIHIRO
分类号 G01R1/06;G01R1/04;G01R1/067;G01R31/28;G01R35/00;H01L21/66;(IPC1-7):G01R31/28 主分类号 G01R1/06
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