Magnetic sensor for determination of the rotation angle of a rotating component, comprises a semiconductor substrate with a magnetic field sensor deposited on one side and an analysis integrated circuit formed on the other side

摘要

Magnetic sensor arrangement comprises a magnetic-field sensitive sensor layer (2) and analysis electronics (4) for processing of the electrical output signal generated by the sensor layer. Said sensor layer is formed on one side of a semiconductor substrate (3), while the integrated circuit analysis electronics (4) are formed on the other side of the substrate. The invention also relates to a corresponding method for production of a magnetic sensor arrangement using thin film technology. A GMR sensor is deposited on the sensor layer of the semiconductor substrate used cathode sputtering.