| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a grinding pad not attenuating detecting light for detecting an end point on the grinding pad, and preventing the damage of a window portion allowing the detecting light pass through. <P>SOLUTION: The grinding pad 1 grinding a workpiece has an opening portion 11 penetrating the grinding pad 1 in a thickness direction thereof, the window portion 12 made from transparent material buried in the opening portion 11, and a groove 13 connecting from the opening portion 11 to the outside of a periphery of the grinding pad 1 and formed in a grinding surface 1s side of the grinding pad 1. A window portion surface 12s in the grinding surface 1s side is formed in the inner side of the grinding pad 1 in the width direction of the grinding pad 1 as compared with the grinding surface 1s. A bottom portion 13b of the groove 13 is formed at the same height as the window portion surface 12s or in the inner side of the grinding pad 1 in the thickness direction of the grinding pad 1 as compared with the window portion surface 12s. <P>COPYRIGHT: (C)2004,JPO |
