Laser beam machine for micro-hole machining

摘要

The present invention relates to a laser beam machine having a laser oscillator, for generating a laser beam; a light path system, including galvano mirrors and an ftheta lens that form a light path along which the laser beam emitted by the laser oscillator is guided to an object; and a diffractive optical element, located along the light path leading from the laser oscillator to the galvano mirrors.