发明名称 |
ArF and KrF excimer laser apparatus and fluorine laser apparatus for lithography |
摘要 |
The present invention relates to an ArF excimer laser apparatus for lithography capable of stretching the laser pulse width even when the repetition rate exceeds 4 kHz and also relates to a KrF excimer laser apparatus and fluorine laser apparatus for lithography capable of stretching the laser pulse width even when the repetition rate exceeds 2 kHz. In a laser apparatus for lithography having laser discharge electrodes disposed in a laser chamber and a peaking capacitor connected in parallel to the laser discharge electrodes, the period Tn of the waveform of an oscillating current flowing in a first circuit loop formed by the final-stage capacitor of a magnetic pulse compression circuit and the laser discharge electrode and the period Tp of the waveform of an oscillating current flowing in a second circuit loop formed by the peaking capacitor and the laser discharge electrodes satisfy the condition of 5Tp<=Tn, and the period Tn satisfies the condition of Tn<250 ns, whereby a laser oscillating operation is performed by at least 2.5 cycles of the oscillating current flowing between the laser discharge electrodes.
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申请公布号 |
US6636546(B2) |
申请公布日期 |
2003.10.21 |
申请号 |
US20010971090 |
申请日期 |
2001.10.03 |
申请人 |
USHIO DENKI KABUSHIKI KAISYA |
发明人 |
KAKIZAKI KOJI;SASAKI YOICHI |
分类号 |
H01S3/097;H01S3/08;H01S3/0975;H01S3/225;(IPC1-7):H01S3/22 |
主分类号 |
H01S3/097 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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