| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce energy of a parallel-plate mode electromagnetic wave being generated internally. <P>SOLUTION: The microwave integrated circuit semiconductor element 4a comprises a microwave semiconductor element 9 and a coplanar transmission line 13 for inputting/outputting a signal to/from the microwave semiconductor element formed on the surface of a planar semiinsulating substrate 8 wherein a resistor film 21 is formed on at least one of the rear surface 14 opposite to the surface, a pair of end faces 22 orthogonal to the coplanar transmission line 13 or a pair of side faces 23 parallel with the coplanar transmission line 13 of the semiinsulating substrate 8. <P>COPYRIGHT: (C)2004,JPO |
