| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for condensing a trace amount of volatile element such as boron existing in silane halide such as trichlorosilane in a short time while reducing contamination. SOLUTION: After forming a complex containing the volatile element by mixing a sample consisting of silane halide containing the volatile element such as boron and a complexing agent such as mannitol together under existence of 2 wt.% or less of water on a silane halide weight basis, at least a part of silane halide in the sample is evaporated to be removed, and then, a silicon constituent in the rest of the sample is converted into silicon fluoride by using hydrofluoric acid and heated to be removed. In this way, the volatile element contained in the sample is condensed. COPYRIGHT: (C)2004,JPO
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