发明名称 CERAMIC SINTERED COMPACT AND PRODUCTION METHOD THEREFOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a ceramic sintered compact having a small thermal expansion coefficient and a large value obtained by dividing its Young's modulus by its density, and to provide a producing method therefor. <P>SOLUTION: The sintered compact comprises cordierite of 90 to 99.8 vol.% and mullite of 0.2 to 10 vol.%. Both contents can be measured by an X-ray diffraction method, and the ratio of the peak strength of the mullite crystal (110) plane to that of the cordierite crystal (110) plane is 0.2 to 20. The sintered compact has a density of &ge;2.48 g/cm<SP>3</SP>, and the average particle diameter of the cordierite crystal contained is &le;2 &mu;m. The sintered compact has the thermal expansion coefficient of -0.2 to 0.2 ppm/K, and the value obtained by dividing its Young's modulus by its density is &ge;54.3 GPa/g/cm<SP>3</SP>. The sintered compact is produced by mixing the powder, or the like, of oxides of Mg, Si, and Al so that cordierite and mullite are contained according to the above contents and then burning the mixture. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2003292372(A) 申请公布日期 2003.10.15
申请号 JP20030022544 申请日期 2003.01.30
申请人 NGK SPARK PLUG CO LTD 发明人 YAMAMOTO HIROSHI;MIURA EIJI;MITSUOKA TAKESHI;URASHIMA KAZUHIRO
分类号 C04B35/195;H01L21/3065;H01L21/68;H01L21/683 主分类号 C04B35/195
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