| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an LSI tester in which a test flow is controlled so as to be branched arbitrarily and correctly when a semiconductor device is tested by the LSI tester, and to provide a testing method for the semiconductor device. <P>SOLUTION: The LSI tester 1 comprises a tester mainframe part 20, a first test station 30, and a second test station 40. The tester mainframe part 20 is provided with a CPU 21, a memory part 22, a test-resource generation part 24, a distribution part 26, a flag setting means 211 used to set flag information, a flag-reference-command execution means 213 used to confirm the existence of the flag information and used to control a test program so as to be branched, a flag display means 215 used to display setting information on a flag, and a flag deletion means 217 used to delete corresponding flag information when the test program is deleted from the memory part 22. <P>COPYRIGHT: (C)2004,JPO |
