Inertial sensor having an integrated temperature probe

摘要

The acceleration sensor has a plate (1) in which is delimited a support part (2), with a vibrating element (7) carried by this support part, which is sensitive to the movements that the sensor is subjected to, and an additional part which is connected to the vibrating element and active in the detection of acceleration. The sensor includes a temperature probe having a conductor rail (10) which is fixed on the additional active part, and which has a variable resistance as a function of ambient temperature.