| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a triaxial load measuring sensor capable of decomposing a working load into a pressure in the vertical direction to a working face and a shearing force in the parallel direction to the working face and measuring them. <P>SOLUTION: On a printed wiring board 1, two Hall elements 3<SB>1</SB>, 3<SB>2</SB>are arranged along the X-axis direction, and two Hall elements 3<SB>3</SB>, 3<SB>4</SB>are arranged along the Y-axis direction. A permanent magnet 7 having the area covering all the four Hall elements is arranged oppositely to the four Hall elements through a gel pad 6 having a prescribed thickness, and the upper face of the permanent magnet 7 is used as the working face of the load. Subtraction is performed between each output from the two Hall elements arranged in the X-axis direction to thereby determine a differential value ΔX, and subtraction is performed between each output from the two Hall elements arranged in the Y-axis direction to thereby determine a differential value ΔY, and the shearing force and its direction and the pressure are determined by using the differential values in the X-axis and Y-axis directions. <P>COPYRIGHT: (C)2004,JPO |
