| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a composition capable of forming a resist film excellent in actinic ray sensitivity. <P>SOLUTION: This actinic ray composition is characterized by containing (A) a methylenedioxolane compound or its derivative and (B) at least 1 kind of a polymer selected from (a) a polymer containing 0.1-10 equivalent hydroxyphenyl group/1 kg of the polymer, and having 3,000-100,000 range number-average molecular weight and ≥0°C glass transition point, (b) a polymer containing 1-10 equivalent hydroxyphenyl group/1 kg of the polymer, and having 500-100,000 range number-average molecular weight and ≥0°C glass transition point and (c) a polymer containing 0.1-20 equivalent hydroxyphenyl and carboxyl group/1 kg of the polymer, and having 500-100,000 range number-average molecular weight and ≥0°C glass transition point, as indispensable components. <P>COPYRIGHT: (C)2004,JPO |
