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发明名称
SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号
KR20030078699(A)
申请公布日期
2003.10.08
申请号
KR20030019041
申请日期
2003.03.27
申请人
发明人
分类号
H01L21/306;C23C16/44;H01L21/00;H01L21/205;H01L21/3065
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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