| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a thin ceramic substrate capable of remarkably shortening the production process as compared with a conventional method. SOLUTION: Quartz glass powder 40 is put on a lower die 13, and an upper die unit 4, a lower die unit 11 and the quartz glass powder 40 are heated. After attaining to a prescribed molding temperature, press load is applied to the quartz glass powder 40 between the upper die 6 and the lower die 13 by moving a moving shaft 9 forward to mold a quartz glass substrate 41. After cooling the upper die unit 4, the lower die unit 11 and the quartz glass substrate 41 to a prescribed temperature, the moving shaft 9 is moved backward to open the dies and the quartz glass substrate 41 is taken out. COPYRIGHT: (C)2004,JPO |
